XSA Series Normally Closed High Vacuum Solenoid Valve

Brand: SOLH by Richge Technology 

1. Product Positioning

     SOLH XSA series is a normally closed solenoid valve specially engineered for ultra-high vacuum circuits. It realizes precise on-off control of air and inert gas media. Featuring ultimate high vacuum tolerance, ultra-minimal leakage, clean anti-contamination construction and fast response speed, it serves as a core vacuum component for precision process equipment including semiconductors, PV panels, LCD displays, medical and food processing machinery.

2. Core Key Features

-- Ultra High Vacuum Compatibility

     Minimum operating absolute pressure reaches 1×10⁻⁶ Pa, fully meeting ultra-high vacuum process standards to guarantee stable vacuum retention and rapid pumping efficiency of vacuum systems.

-- Superior Tight Sealing & Ultra-Low Leakage

     Internal leakage ≤ 1.3×10⁻⁹ Pa·m³/s; external leakage ≤ 1.3×10⁻¹¹ Pa·m³/s. Dual low-leakage performance stabilizes system vacuum degree and eliminates hazardous gas escape risks for working environments.

-- Clean Low-Particle Optimized Structure

     Internal spring integrated inside valve body to reduce friction of moving components and particle generation, perfectly matching production lines with strict cleanroom grade requirements.

-- Low Power Consumption & Lightweight Outline

     Coil power consumption reduced by up to 25% compared with previous generations; overall weight cut by maximum 18% (minimum 0.41kg). Energy-saving design facilitates compact integration into precision equipment frames.

-- Multiple Connection Options

     Two universal connection schemes available: face seal fittings, 1/4" & 3/8" ferrule compression fittings, and internal Rc/NPT threads, compatible with various standard vacuum pipeline specifications.

-- Wide Voltage Range & Diverse Electrical Terminals

     Covers mainstream voltages including DC24V, AC110V / AC220V. Multiple wiring forms such as quick plug terminals, DIN terminals and conduit entry adapt to all mainstream automated control systems.

-- Stable & Safe Industrial Certification

     Coil flame retardant grade UL94V-0; certified with RoHS, CE, CAT.ES140-7B standards, suitable for long-term continuous non-stop industrial operation.

3. Full Technical Specification Table

4. Typical Application Scenarios

      --Semiconductor manufacturing: Process chamber gas injection & vacuum pipeline on-off control

     -- PV & LCD production lines: Ultra-high vacuum chamber pumping and pressure holding loops

     -- Medical equipment: Vacuum sterilization instruments and analytical lab vacuum circuits

     -- Food industry: Vacuum packaging and vacuum drying machinery

     -- Scientific research laboratories: Ultra-high vacuum experimental devices and particle physics test equipment

5. Model Examples & Selection Guidelines

5.1: Typical Model Codes:XSA1-12S-5G2, XSA1-11P-5G2

5.2 Key Selection Points

      -- Confirm vacuum grade requirement: Whether 1×10⁻⁶ Pa (abs) ultra-high vacuum performance is required

      -- Select pipeline connection type: Face seal, ferrule fitting or Rc/NPT internal thread

      -- Match coil voltage and electrical terminal: DC24V or AC series; quick plug / DIN / conduit wiring

      -- Confirm port size: 1/4", 3/8" to satisfy system flow demand

One Sentence Summary

     SOLH XSA normally closed high vacuum solenoid valve supports 1×10⁻⁶ Pa ultra-high vacuum operation with ultra-low leakage, clean low-particle internal structure and multiple interchangeable connections, acting as a reliable switching component for all precision vacuum industrial processes.