SRH Series Clean Type Pressure Regulating Valve | Richge Technology

Brand: SRH Series by Richge Technology (睿其格科技)

Product Positioning

     The SRH series is a high-purity stainless steel precision pressure regulator engineered for ultra-clean, corrosion-resistant and low-contamination fluid control scenarios. Manufactured under strict Richge clean-grade standards, this valve delivers stable and accurate pressure control for clean air, nitrogen, argon, carbon dioxide and purified water. It serves as a standard high-clean regulating component for semiconductor, photovoltaic, LCD and biopharmaceutical high-end manufacturing lines.

Core Clean-Grade Features

     • Full Stainless Steel Wetted Parts: Adopts SUS316/316L material for all contact surfaces, featuring acid and corrosion resistance with zero ion precipitation and no secondary pollution.

     • Strict Oil-Free Manufacturing: Produced in Class 100 cleanrooms and cleaned with 16MΩ·cm ultra-pure water to ensure low particle and low residue performance.

     • Optimized Clean Structure: Minimal dead volume design with diaphragm-isolated spring structure to avoid internal contamination and residue accumulation.

     • Dual Diaphragm Grades Optional: Grade A PTFE diaphragm for ultra-clean semiconductor environments; Grade B FKM diaphragm for general corrosion-resistant working conditions.

     • Dual Functional Versions: Relief and non-relief types available, adapting to high-purity gas delivery and vacuum system control requirements.

Technical Parameters

     • Structure Type: Direct-acting precision pressure regulator

     • Wetted Materials: SUS316/316L, PTFE / FKM diaphragm

     • Applicable Media: Clean air, N₂, Ar, CO₂, pure water

     • Max Inlet Pressure: 1.0 MPa

     • Adjustable Pressure Range: 0.02–0.2 MPa / 0.05–0.7 MPa

     • Port Size: Rc1/8, 1/4, 3/8, 1/2

     • Operating Temperature: 0℃～60℃

     • Control Accuracy: Hysteresis ≤0.01MPa; Repeatability ≤0.005MPa

     • Compliance Standards: RoHS, CE, SEMESCO

Model Series

     • SRH3000: Compact type, applicable for 1/8"–1/4" port sizes

     • SRH4000: Medium type, applicable for 1/4"–1/2" port sizes

Application Industries

     Semiconductor etching and CVD process gas control, photovoltaic and LCD manufacturing, biopharmaceutical sterile gas and pure water systems, food and electronic inert gas protection, laboratory chromatography and vacuum precision equipment.

Core Summary

     SRH series clean pressure regulator features full SUS316L oil-free structure, low particle and low residue performance, dual-grade diaphragm selection and high-precision pressure control. It is the standard ultra-clean fluid control valve for high-end precision manufacturing industries.